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A wireless temperature sensor for the measurement of temperatures up to 600°C was developed. The passive sensor is based on SAW resonators on Langasite substrate. To support temperatures up to 600°C, new processes for front-end and back-end were developed and new material parameters for simulation of SAW devices on Langasite had to be determined. The results for the applied metallization system are discussed. Novel and reliable solutions in the field of assembly technology of a high-temperature surface mount package are presented. Wired and wireless measurements will be shown. Harsh environment reliability data, e.g. temperature cycling between 50°C and 650°C, temperature storage at 600°C and temperature measurements up to 700°C will be demonstrated. The development of appropriate resonator designs and investigations made for definition of operating frequency range of sensors are covered. For wireless interrogation, an antenna optimised for high temperature operation at 433 MHz was developed.

C3.3 - A 600°C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators