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This paper presents a system which combines a modern 350 nm mixed-signal CMOS technology with a MEMS technology for monitoring of the filter contamination level of suction and filtering systems. Therefore the system includes a piezoresistive pressure sensor, a controller core, a power management, a digital and analog signal processing with a variable gain up to 270 and an 8 bit autonomous offset adjust as well as a RFID interface to allow wireless transfer of energy and data.

C2.3 - A monolithic integrated MEMS in a 350 nm technology for filter monitoring applications