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Linear Variable Differential Inductor (LVDI) probes are used for most precise roundness and roughness measurements down to sub–nanometer. Even under rough conditions the LVDI guarantees a good repeatability of the measurement. In this paper some widely overlooked sources of errors that–if unavoidable–increase measurement uncertainty beyond the theoretical limit attainable are discussed and the magnitude of their influence is detailed. Usually safely ignored influences like stochastic noise, heating and elastic deformation can result in uncertainties of several nanometers.

B4.4 - Uncertainties of a Linear Variable Differential Inductor Probe for Picometer Resolution Measurement Systems