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We have extended measurable pressure range of the thin film Pirani vacuum sensor that is still sensitive above 1 atmosphere (atm). In our thin film Pirani vacuum sensor, our proposed temperature difference sensor of the short circuit Seebeck-current detection type thermocouple is used in order to get extremely high sensitivity, especially in high vacuum range. A little temperature difference, which should be zero under very high vacuum, between the microheater and the thermally isolated heading area from the microheater of the cantilever can be measured. We have achieved much wider measurable pressure range over 8 digits by use of our new simple thin film Pirani vacuum sensor than that of the traditional one. We could expand the pressure sensitivity beyond 1 atm. by adoption of the vibration of the sensing cantilever due to the sudden heating.

P1.11 - Proposal of the Thin Film Pirani Vacuum Sensor Still Sensitive Above 1 Atmosphere