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The Institute for Microtechnology (imt) at the Leibniz Universität Hannover`s Center for Production Technology (PZH) in Garbsen, Germany, is one of the world`s leading institutions with a focus on the design and fabrication of magnetic micro sensors and actuators. Although there is a growing demand for the development of magnetic micro actuators for hard disk drive applications, micro positioning or fluidic control, the area of micro sensors is still dominating the market. One focus in the development of magnetic micro sensors is set on the needs of the automotive industry to optimize the driver`s safety or the driving comfort. This paper provides an overview over the activities in the area of the development and fabrication of magnetic micro sensors at the imt. The sensors cover a wide range of applications including strain, position measurement, and the detection of the magnetic properties of patternd magnetic thin-films. The sensors are either based on magneto-elastic effects for strain measurement applications or they use the inductive effect for position measurement or the characterization of magnetic thin-films used in magnetic Micro Electro-mechanical Systems (MEMS). To achieve an optimal design of the micro sensors, FEM analyses are performed using the simulation software ANSYSTM.

A6.4 - Magnetic Micro Sensor Activities at the Leibniz Universität Hannover