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A translatory MOEMS actuator with extraordinary large stroke – especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers is presen¬ted. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1.2 mm is realized by means of a new suspension design of the comparative large mirror plate with 19.6 mm2 aperture using four pantographs. The MOEMS device is driven electro statically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 600 μm amplitude (typically 1mm stroke) has been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher driving efficiency.

P12 -Out-of-plane Translatory MEMS Actuator with Extraordinary Large Stroke for Optical Path Length Modulation in Miniaturized FTIR Spectrometers