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We report a sensor technology, based on plasma electrolytic oxidation, to form porous titanium oxide layers with well-defined phases and a reproducible microstructure on titanium substrates. By using a imprinting method to deposit graphite or catalytically active graphite-platinum electrodes, chemical sensors are obtained with high stability. Our design enables the application of a variety of different detection principles. They include non-isothermal and isothermal calorimetry, impedance spectroscopy as well as amperometry. Results are presented for H2O, H2, NO2 and CO sensing with the most appropriate detection principle, electrode composition and titanium oxide microstructure.

P2GS.28 - Gas Sensor Technology based on Titanium Oxide and Platinum-Carbon Layers