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Novel catalytic combustion-type gas sensors using Fe2O3-based thin film have been developed. The sensor output voltage was enhanced by adopting Fe2O3-based film as a temperature sensing resistor which had higher temperature coefficient of resistance than that of Pt. Thin film technology, IC fabrication process and MEMS technology were utilized to fabricate the sensing film and the meandertype heater on an insulating diaphragm. Pd dispersed on γ-alumina and γ-alumina were used for the sensing element and the reference element, respectively. In this study, the target gases were H2, C2H4, C2H6, CH4, C3H8 and CO. The sensor was able to detect each gas at low gas concentrations (10 ppm for H2, C2H4, C2H6, C3H8 and 70 ppm for CH4).

P2GS.19 - Catalytic Combustion-Type Gas Sensors Using Fe2O3- Based Thin Film as a Temperature Sensing Resistor