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In this paper, an in-situ fabrication method of coating metal organic framework (MOF) on film bulk acoustic resonator (FBAR) was described. This method is mild and straightforward, able to produce dense and homogeneous sorptive layers on FBAR. The surface of MOF layer on FBAR was further modified with several types of self-assembled monolayers (SAMs). The introduction of SAMs on MOF can vary the response of FBAR sensors toward volatile organic compounds (VOCs). The prepared 4 FBAR sensors were arrayed to facilitate the recognition of VOCs. The response of FBAR sensors array toward methanol, ethanol, n-propanol and hexane, was analyzed by pattern recognition algorithm, which led to a clear separation of the VOCs.

P2AR.12 - Surface Tuning on Metal Organic Frameworks for Film Bulk Acoustic Resonator Sensors Array