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In this paper, we propose a photo-activated metal oxide gas sensor integrated with a commercial μ-LED (λpeak = 390 nm) for high photo-irradiation efficiency. The sensing materials, ZnO nanowires or SnO2 nanotubes, were grown on parallel electrodes of Indium Tin Oxide (ITO) patterned on a quartz substrate. The transparency of the ITO electrodes and the quartz substrate allowed the UV LED to be placed beneath the quartz substrate to irradiate the grown nanomaterial, thereby resulting in enhanced gas sensing performance. The ZnO nanowires or SnO2 nanotubes were directly synthesized by a liquid-phase process on the patterned ITO electrodes for precise positioning and facile assembly of the one-dimensional nanomaterials. Due to the small distance between the photoemitter and the photoreceptor (ZnO or SnO2), the irradiation efficiency is improved in relation to sensors that use external light sources like UV lamps. Furthermore, we have demonstrated that the sensing performance for NO2 gas improves as the intensity of UV light increases.

AP1.6 - Photo-activated NO2 Sensors with 1-D nanomaterials Integrated with Micro-LED for High Irradiation Efficiency