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New type simple solid-electrolyte NOx (NOx; NO, NO2) sensor devices were fabricated using an yttriastabilized zirconia (YSZ) as an impedance transducer and metal oxides (Fe2O3, Co3O4, NiO, CuO and ZnO) as receptors. The sensor signal could be simply detected as the impedance change of the only YSZ plate. The sensing performance of the impedancemetric NOx sensor for the detection of NOx in the range 10 ~ 150 ppm at 300 ~ 500˚C was investigated using AC impedance analyzer. The NiO/YSZ-based compact impedancemetric sensor device showed good sensing properties for NO and NO2 at 400˚C on 100 kHz.

P1.6.1 Impedancemetric NOx Sensor Using YSZ-Based Solid Electrolyte Attached with Oxide Receptor