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Self-actuated and self read-out PZT cantilevers made of Au/PZT/Au (8x2x0.08mm 3 ) beam layers on an alumina substrate are fabricated thanks to the association of screen-printing and sacrificial layer technique. Then, PZT cantilevers used as piezoelectric resonant type sensors are functionalized with an organic PEUT layer for toluene detection at room temperature. Due to their higher resonant frequency, cantilevers using the unusual 31 longitudinal vibration mode have higher sensitivities (0.047Hz/ppm) than those actuated with the classical flexural mode. These interesting results demonstrate the potentialities of printed PZT cantilevers for gas detection. Their performances are compared with those of silicon cantilevers.

P1.2.8 Screen-printed PZT cantilevers coated with PEUT for toluene detection. Comparison with silicon cantilevers