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Various types of acoustic wave sensors have been investigated for gas sensing applications, but only a view of them are in industrial use until now. This works compares the recent development of two MEMS based acoustic transducers for gas sensors: The electrostatic driven Capacitive Micromachined Ultrasonic Transducer (CMUT) and the piezoelectric Film Bulk Acoustic Resonator (FBAR). Main characteristics of current transducers are compared with respect to their applicability for industrial gas sensors. The detection of CO2 is investigated using a polysiloxane based sensing layer.

proceedings imcs 2012

5.4.1 Potentials of Capacitive Micromachined Ultrasonic Transducers (CMUT) and Film Bulk Acoustic Wave Resonators (FBAR) for Gas Sensing -an Industrial Point of View