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A sensor to evaluate sterilization processes with hydrogen peroxide vapor has been introduced. Experimental, analytical and numerical methods have been applied to evaluate and study the sensor behavior. The sensor set-up is based on a planar interdigitated electrode array of a total sensing area of 20 mm2. Sensor measurements with and without microbiological spores have been conducted. Further measurements have been performed after chemical sterilization using vaporized hydrogen peroxide. The measurements were verified using a predefined published equation used to describe periodic planar interdigitated structures. Additionally, a two-dimensional periodic finite element method model was designed and simulated to validate the experimental findings

P3.11 - Experimental and numerical evaluation of interdigitated electrode array for monitoring gaseous sterilization processes