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Differential Vibrating Accelerometer(DVA) is a small and accurate resonant device to sense the change in natural frequency in presence of acceleration input. Both mathematical modeling for the electromechanical dynamics and experimental investigation on the structural characteristics are necessary for effective designs of precision controller and high Q-factor structure. In this paper, electromechanical modeling of the resonator of DVA, electrode module, and pre-amplifier is presented. The presented method is experimentally verified by measuring the resonance frequency, effective mass, effective stiffness and Q-factor. The direct comparison of the calculated displacement and the actual pre-amplifier of DVA also indicates the effectiveness of this study.

Electromechanical Modeling and Experimental Verification of Differential Vibrating Accelerometer