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We analyzed nonlinear model with varying in space and time coefficients of growth of epitaxial layers from gas phase in a vertical reactor with account native convection. We formulate several conditions to increase homogeneity of epitaxial layers with varying of technological process parameters.

international journal on organic electronics

Analysis of Possibility of Growth of Several Epitaxial Layers Simultaneously In Gas Phases Framework One Technological Process. On Possibility to Change Properties of Epitaxial Layers