Low-Residual-Stress Amorphous Film for LiTaO3/Quartz or LiNbO3/Quartz Bonding toward 5G Surface Acoustic Wave Devices | Zendy

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Low-Residual-Stress Amorphous Film for LiTaO<sub>3</sub>/Quartz or LiNbO<sub>3</sub>/Quartz Bonding toward 5G Surface Acoustic Wave Devices

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