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A new process to achieve a flat fine conductor pattern on LTCC green sheets is proposed in this paper. Conventionally, the screen printing method has mainly been used to form the conductor pattern on LTCC green sheets. However, it has become difficult to achieve further miniaturization using this method. In the method proposed here, photo resist film on PET is exposed to form arbitrarily designed patterns as the first step. Next, the conductor pattern is formed by filling the resist grooves with conductor paste. The resist is dissolved, and the specimen is then coated with LTCC slurry. Through these processes, a fine conductor pattern with a flat surface is formed on the LTCC green sheet. Using this new method, the authors obtained a fine pattern in which the lines and spaces were 20 μm. A through-hole also was created using a similar method.

A Forming Method for a Flat Fine Conductor and Arbitrarily Shaped Through-Hole on a LTCC Green Sheet Using Photo Resist Film