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werefixed at 1.5% and 0.5%.To elucidate the effect of the cyclic process on theenhancement of the diamond nucleation density andthe diamond quality, we deposited the diamond filmvia two different ways, namely, the cyclic processand the normal process. For the cyclic process, weincorporated the cyclic modulation process of CH

journal of the korean chemical society

Time-Dependent Cyclic Modulation Process of CH4Gas Flow Rate in CH4-H2-O2Plasma for the Enhancement of Diamond Film Characteristics