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To synthesize a new positive-working photosensitive polyimide, alkali-soluble polyimide containing carbox-ylic acid side group was synthesized, and parts of its carboxylic acid groups were esterified with 4,5-dimethoxy-2-nitrobenzyl bromide. The chemical structure of the resulting polymer was characterized by

Synthesis and Characterizations of Positive-Working Photosensitive Polyimides Having 4,5-Dimethoxy-o-Nitrobenzyl Side Group