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A highly sensitive detecting method has been developed for determining part per billion of sulfur in H 2 S/Ar plasma. The method is based on the excitation of Ar/H 2 S or Ar/H 2 S/O 2 mixture in hollow cathode glow dischargesustained by radiofrequency (RF) or 60 Hz AC power and the spectroscopic measurement of the intensity of emission lines from electronically excited S 2 * or SO 2 * species, respectively. The RF or AC power needed for the excitation did not exceed 30 W at a gas pressure maintained at several mbar. The emission intensity from the SO 2 * species showed excellent linear response to the sulfur concentration ranging from 5 ppbv, which correspond to S/N = 5, to 500 ppbv. But the intensity from the S 2 * species showed a linear response to the H 2 S only at low flow rate under 20 sccm (mL/min) of the sample gas. Separate experiments using SO 2 gas as the source of sulfur demonstrated that the presence of O 2 in the argon plasma is essential for obtaining prominent SO 2 * emission lines.

Molecular Emission Spectrometric Detection of Low Level Sulfur Using Hollow Cathode Glow Discharge