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Thermal micro actuators are widely used for large displacement, high accuracy and repeatability. The applications of these devices are in the fields of micro assembly, micro surgery and manipulation of micro particles. In this paper, the development of electro thermal micro actuator based on PMMA (Poly Meta Methyl Acrylate) is described. The paper presents the development of a new micro actuator for a microgripper which has a combination of asymmetric arm and bi-layer structure to completely eliminate the undesirable out of plane movement. Three models of electro thermally actuated polymeric micro actuators using low voltage of 0.1 V are designed and analyzed using COMSOL Multiphysics software. The results are discussed and compared to show the efficiency of the hybrid design. The hybrid design gives 2.5 µm of in plane gripping displacement and 0.02 µm out of plane displacement at 0.1 V.

Hybrid Design of a Polymeric Electrothermal Actuator for Microgripper