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In this paper, the technique that determines efficient process combinations for the ultrapure water production was studied. The ultrapure water is one of the industrial water used in industrial activity and required in the advanced technology integrated industry. It is produced by combined process including filtration, ion exchange processes, the reverse osmosis (RO) process, degassing (DG) process and UV-oxidation (UVox) process. An ultrapure water production process consists of 15-20 different water treatment unit process. In this study, a pilot plant was built and operated to research the design parameters for the individual process. Through the pilot plant operation, 19 effective combinations were optimized among various processes. And then, 11 of them satisfied the final quality of the ultrapure water. The stability and economic feasibility were evaluated about the final 11 process combinations.

A Study of the Optimization Process Combination on the Ultrapure Water Treatment System