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An attempt has been made to optimize elongated rotating arc plasma scrubber. Among diverse semiconductor processes, diffusion and implantation process inevitably produce as byproduct and efficient dry process for the decomposition of is required. Plasma process does not produce NOx that is commonly produced in combustion process and there is no problem of deactivation, usually experienced in catalyst process. However, plasma process uses electrical energy and needs to be optimized to achieve feasibility of application. In this work, mode control of rotating arc is presented as tentative solution for the possible optimization of the process. Based on existing rotating arc, scale-up and following mode mapping was tried. Proposed reactor design was evaluated in the decomposition process and revealed that optimization scheme is at hand. In the experiment of full scale scrubber including heat exchanger, the process gave more stable and efficient process of decomposition.

Characteristics of NH3 Decomposition according to Discharge Mode in Elongated Rotating Arc Reactor