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is the most important greenhouse gas with the highest GWP (global warming potential). The decomposition study was performed with silicon carbide with aluminium oxide by microwave irradiation. DRE (Decomposition and Removal Efficiencie) of were evaluated by GC-TCD unit using 3,000 ppm gas. DRE of was increased by contents to 10~30 wt%, otherwise content of 40~50 wt% was decreased. DRE of up to 99.99% have been achieved in SiC- (20 wt%) and SiC- (30 wt%) above . Also, the DRE of SiC- (30 wt%) at showed 96.72%. In addition to consideration microwave input energy and content, SiC- (30 wt%) can be suggested the best material to control . The results of this study suggest it is important to control content of in SiC for decomposition of with microwave energy.

Removal of SF6over Silicon Carbide with Aluminium Oxide by Microwave Irradiation