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We investigated the low firing of Li2CO3 added 0.2Pb(Mg1/3Nb2/3)O3 - 0.3Pb(Fe1/2Nb1/2) - 0.5Pb(Zr0.475Ti0.525)O3 (PMNPFN-PZT) ceramics and multilayer actuators (MLAs) using Ag inner electrodes. It was found that 0.1 wt% Li2CO3 was quite effective in lowering the sintering temperature of PMN-PFN-PZT ceramics from 1,100℃ down to 900℃ without deteriorating their piezoelectric ceramics (d33 = 425 pC/N and kp = 61.9%). However, excess Li2CO3 up to 0.3 wt% brings about unwanted problems such as the formation of a LiPbO2 secondary phase and subsequent degradation in the piezoelectric properties. Using 0.1 wt% Li2CO3 added PMN-PFN-PZT ceramics, MLAs with Ag inner electrodes were successfully fabricated, resulting in a normalized strain of 580 pm/V at an electric field of 1.5 kV/mm.

Low-Firing Pb(Zr,Ti)O3-Based Multilayer Ceramic Actuators Using Ag Inner Electrode

Low-Firing Pb(Zr,Ti)O₃-Based Multilayer Ceramic Actuators Using Ag Inner Electrode