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Thin films of cubic , which is one of the sodium tungsten bronze, were fabricated by rf sputtering for the electrode applications in integrated sensors and actuators. A single-phase cubic sputtering target of power type was prepared by conventional solid-state reaction. Thin films were deposited from the powder target, and the as-deposited films were amorphous, thus they annealed by tube furnace or RTP for crystallization. Thin films having cubic phase were fabricated by the optimization of sputtering and post-annealing conditions, but single-phase cubic thin films were not obtained. Although the films were not in single phase, they had good electrical conduction properties showing electrical resistivities of order.

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Phase Formation Behavior and Electrical Conduction Properties of Na<sub>0.6</sub>WO<sub>3</sub>Thin Films Prepared by RF Sputtering Followed by Annealing

Phase Formation Behavior and Electrical Conduction Properties of Na0.6WO3Thin Films Prepared by RF Sputtering Followed by Annealing

Phase Formation Behavior and Electrical Conduction Properties of Na_0.6WO₃Thin Films Prepared by RF Sputtering Followed by Annealing