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In this work, we designed and fabricated a multilayer thin film Pb(Zr,Ti)O3 cantilever with a Si proof mass for low frequency vibration energy harvesting applications. A mathematical model of a mu lti-layer composite beam was derived and applied in a parametric analysis of the piezoelectric cantilever. Finally, the dimensions of the cantilever were determined for the resonant frequency of the cantilever. W e fabricated a device with beam dimensions of about 4,930 μm × 450 μm × 12 μm, and an integrated Si proof mass with dimensions of about 1,410 μm × 450 μm × 450 μm. The resonant frequency, maximum peak voltage, and highest average power of the cantilever device were 84.5 Hz, 88 mV, and 0.166 μWat 1.0 g and 23.7 Ω, respectively. The dimensions of the cantilever were determined for the resonance frequ ency of the cantilever.

Fabrication and Characteristics of Micro PZT Cantilever Energy Harvester Using MEMS Technologies