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In this study, the piezoelectric energy harvester was investigated employing the pillar structure with the diameter size of 50~500 um. Usually, the aspect ratio between the height and diameter was related with the piezoelectric performance. High aspect ratio was showed the low electric noise and high piezoelectric properties than low aspect ratio. Therefore, we have selected the Su-8 photo-resist and modified lithography process to manufacture the pillar structure with height above the 250 . In this presentation, we will report the process and properties of micro pillar structure based on the PMN-PZT (Pb-PbZrTiO) materials.

Processing Study for the Micro Pillar for Piezoelectric Energy Harvest