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CoSiB is the amorphous ferromagnetic material and multilayer consisting of CoSiB and Pd has perpendicular magnetic anisotropic property. PMA has strong advantages for STT-MRAM. Moreover, amorphous materials have two advantages more than crystalline materials: no grain boundary and good thermal stability. Therefore, we studied the magnetic properties of multilayers consisting of the Co75Si15B10 with PMA. In this study, we investigated the magnetic property of the [CoSiB (3, 4, 5, and 6) Å/Pd (11, 13, 15, 17, 19, and 24 Å)]5 multilayers and found the annealing temperature dependence of the magnetic property. The annealing temperature range is from room temperature to 500 C. The coercivity and the saturation magnetization of the CoSiB/Pd multilayer system have a close association with the annealing temperature. Moreover, the coercivity especially shows a sudden increasing at the specific annealing temperature.

Influence of Layer-thickness and Annealing on Magnetic Properties of CoSiB/Pd Multilayer with Perpendicular Magnetic Anisotropy