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We prepared Cr2O3-Ta2O5 composite films using our RF magnetron co-sputtering method for the first time.X-ray diffraction (XRD) patterns and photoluminescence (PL) spectra of thefilms annealed at 700℃, 800℃, 900℃, and 1000℃ were evaluated. From their XRDpatterns, the Cr2O3-Ta2O5 filmannealed at 700℃ seemed to bealmost amorphous, and the one annealed at 800℃ seemed to be hexagonal Ta2O5 doped with Cr. Inaddition, the Cr2O3-Ta2O5 filmsannealed at 900℃ and 1000℃ seemed to include tetragonal CrTaO4 phases. Furthermore, itseems that almost no defect exists in our Cr2O3-Ta2O5 composite films annealed at 700℃ - 1000℃ because their PL spectra have nodefect-related peak. We thus find that good-quality Cr2O3-Ta2O5 composite films including CrTaO4 can be obtainedusing our very simple co-sputtering method and subsequent annealing above900℃.

Preparation of Cr2O3-Ta2O5 Composites Using RF Magnetron Sputtering