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This paper provides a new system and concept concerning to MEMS air turbine power generator. The generator was composed of the MEMS air turbine and the magnetic circuit. The magnetic circuit was fabricated by multilayer magnetic ceramic technology and achieved monolithic structure which included high permeability material and three di-mensional helical conductor patterns inside. Although the output power was micro watt class, some features were extracted by comparing to the simple winding wire type magnetic circuit. In the power density measurement, almost same output power density was extracted though the turn number of the winding wire type was more than that of monolithic type. Also the resistance of the conductor was quarter of the winding type. The maximum output voltage and the maximum power of the monolithic generator was 6.2 mV and 1.92 µVA respectively. The DC conductor resistance was 1.2 Ω. The energy density was 0.046 µVA/mm3. The appearance size of the monolithic type was 3.6, 3.4, 3.5 mm, length, width and height respectively

Millimeter Scale MEMS Air Turbine Generator by Winding Wire and Multilayer Magnetic Ceramic Circuit