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A reflecting diffraction grating has been etched onto the backside of a standard cantilever for atomic force microscopy, and the diffracted light has been used to monitor the angular position of the cantilever. It is shown experimentally that for small angles of incidence and for large reflection angles, the force sensitivity can be improved by few times when an appropriate detection scheme based on the position sensitive (duolateral) detector is used. The first demonstration was performed with a one micron period amplitude diffraction grating onto the backside of an Al-coated cantilever etched by a focused ion beam milling for the experiments in air and an analogous 600 nm-period grating for the experiments in air and in water.

The Use of Light Diffracted from Grating Etched onto the Backside Surface of an Atomic Force Microscope Cantilever Increases the Force Sensitivity