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A simple method for measuring RF plasma parameters by means of a DC-biased Langmuir probe is developed. The object of this paper is to ensure the reliability of this method by using the other methods with different principles. First, Langmuir probe current response on RF voltage superimposed to DC biased probe was examined in DC plasmas. Next, probe current response of DC biased probe in RF plasmas was studied and compared with the first experiment. The results were confirmed by using an emissive prove method, an ion acoustic wave method, and a square pulse response method. The method using a simple Langmuir probe is useful and convenient for measuring electron temperature , electron density , time-averaged space potential , and amplitude of space potential oscillation in RF plasmas with a frequency of the order of .

Analysis of Langmuir Probe Characteristics for Measurement of Plasma Parameters in RF Discharge Plasmas