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Pyrolytic carbon (PyC) layers were deposited using methane. The PyC layer deposited with 5% methane showed highly textured graphite, while that deposited using 100% methane showed low textured graphite. The degrees of anisotropy of the carbon layers were measured using an X-ray diffractometer, a transmission electron microscope, and a Raman spectroscope, and the results were compared with those reported previously. The orientation angles obtained from the fast Fourier transformation of the high-resolution transmission electron microscopy images and the ID/IG intensity ratios obtained from the Raman spectra were used to evaluate the anisotropy of the PyC layers.

Microstructural Control of Pyrolytic Carbon Layer Deposited from Methane by Isotropic Chemical Vapor Infiltration