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Silicon nitride ceramics with different microstructures were N+ ion-implanted at energies ranging from 50 to 400keV. Wear tests of these ion-implanted materials were carried out using a Block-on-Ring wear tester under non-lubricated conditions. Specific wear rates varied according to ion energy and these results were explained by the fact that the amorphized region varied dependent on ion energy.

Influence of Nitrogen Ion-Implantation Energy on the Wear Resistance of Silicon Nitride Ceramics with Different Microstructures