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In this study, DLC films were deposited using IBED with various CH4/H2 ratio, gas flow rates and accelerating voltages. The composition and mechanical properties of the DLC coatings were characterized using SEM, Raman spectroscopy and nanoindentor. The tribological properties of the coating were also investigated using a frictional surface microscope with an in situ observation system and friction force measurements. The DLC films were characterized by a lower ID/IG, higher hardness, and improved tribological properties when deposited at a lower accelerating voltage (6 kV). At the CH4/H2 ratio of 1:99 and 6 sccm/6 kV, minimum ID/IG values of 0.62, relatively low friction coefficient of 0.12 , and a maximum hardness of 4056 HV were attained respectively.

Preparation, Characterization and Tribological Properties of Diamond-Like Carbon Film on AZ31 Magnesium Alloy