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The nanocrystalline Strontium Barium Bismuth Titanate (SBBT) thin films with structure of Al/TiO2/SBBT/TiO2/RuO2/SiO2/Si were fabricated using sol-gel technique. The source materials are bismuth acetate Bi(CH3COO)2, barium acetate Bi(CH3COO)2, strontium acetate Sr(CH3COO)2 and titanium butoxide (Ti(OC4H9 )4). Different nanostructures of the films were prepared with un-annealed condition as well as after annealing at three different temperatures of  400, 500 and 6000C, in air for 2 minutes. The structure of SBBT thin films have been systematically studied by XRD, AFM, SEM and dielectric constant measurement. For the sensor device measurement, the SBBT thin film pressure sensors were tested by pneumatic loading method at pressure range between 0 to 450 kPa. It was found that the sensing properties of the films were affected by the crystalline nature  of the films. It is shown that there is  a linear relationship between the crystallization, grains size and dielectric properties with the sensing response of the film towards pressure.

advanced materials research

Materials of Nanocrystalline Sr&lt;sub&gt;1-x&lt;/sub&gt;Ba&lt;sub&gt;x&lt;/sub&gt;Bi&lt;sub&gt;4&lt;/sub&gt;Ti&lt;sub&gt;4&lt;/sub&gt;O&lt;sub&gt;15&lt;/sub&gt; for Piezoelectric Sensor