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A metal-oxide film can be used as a hydrogen-isotope permeation barrier inthe fuel circulation system for nuclear fusion. We fabricated Er$_2$O$_3$ thinfilm on a type 316L stainless-steel substrate by using a metal-organic chemicalvapor deposition technique for the purpose of hydrogen-isotope permeationbarrier. Electron microscopy based imaging and energy-dispersive X-rayspectroscopy measurements indicate a sound film quality together with X-raydiffraction experiments. We also measured deuterium permeation in the film athigh temperatures ranging from 600 $^{\circ}$C to 800 $^{\circ}$C. Thepermeation reduction was most apparent at 650 $^{\circ}$C. Above 800$^{\circ}$C, we confirmed that the film was damaged and did not work as apermeation barrier.

Deuterium permeation in Er$_2$O$_3$ thin film fabricated on a type 316L stainless steel substrate