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Pervasive monitoring, sensing, actuation, and control of environments and systems with innovative signal transduction techniques is a unifying emerging requirement in the longterm technological roadmaps of diverse industries such as healthcare, aerospace, automotive, telecommunications, and consumer electronics. The discovery and increasing understanding of low-dimensional nanomaterials and supermolecular structures over the past decade has opened an important avenue for meeting sorne of these chalJenges. Initial research emerging from different groups worldwide has pointed to novel transduction phenomena that are unique to the nanoscale and highlighted the unprecedented gains in perfonnance from transducers enabled by nanomaterials as compared to their counterparts in the microand macroworld. However, there are significant knowledge gaps and unexplored research issues in, both the understanding of nanomaterial properties and nanoscale phenomena, as welJ as in nanofabrication techniques that are required to build nanoelectromechanical systems (NEMS). The primary focus of this doctoral research relates to harnessing this untapped potential and developing NEMS that realize high performance and significant efficiencies within a small form factor. The first part of this report focuses on nanomachining tools and processes that are required for next generation NEMS. In this area, two key unit processes that are compatible with conventional silicon micro / nanomachining techniques are demonstrated. The first unit process involves directed assembly of diverse carbon nanomaterials using dielectrophoretic (DEP) forces to realize nanostructures with increased complexity than previously possible. The second unit process relates to realizing batch fabricated multiwalled carbon nanotube (MWNT) bearings. This approach employs electric current induced etching of nanotubes to engineer their architecture with control over location, length and number of shelJs. Variants of this unit process, which include piecewise engineering of different NT segments and local control of shell etching by modulating the Joule heat dissipation along NT lengths, enhance its suitability to realize sophisticated nanostructures. Based on the unique combination of unit processes developed within this effort, an integrated nanoscale signal transduction platfonn that employs a single MWNT supermolecule is

Batch fabricated, supermolecular transducers based on multiwalled carbon nanotubes