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2 The influence of the electrode geometry on the sensitivity was investigated. Different designs were simulated, implemented in silicon and characterized by measurements. Different techniques to enhance the discrimination performance have been presented. Thickness-dependent selectivity variations massively contribute to analyte identification and allow for tuning of the layer parameters to achieve desired sensor features. Differential measurements allow for reducing the sensor drift as well as cross-sensitivity towards humidity by an order of magnitude. Reduction of the required chip size was achieved by switching the electrical connection of the electrodes. Transient signal analysis is used to discriminate analytes of a homologous series of alcohols. Advantages and drawbacks of all techniques are discussed. The solution of choice depends on the sensor application.

Tuning sensitivity and discrimination performance of CMOS capacitive chemical microsensor systems