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We present experimental and theoretical investigations of pHEMT heterostructures with AlGaAs/InGaAs/GaAs quantum wells (QWs) and/or a delta-doped layer, which can be used as active regions in transistors operating in the 4-18 GHz frequency range. Using the electrochemical capacitance-voltage setup ECV Pro we, for the first time, experimentally observed a concentration peak from the near-surface delta layer of the pHEMT structure together with a peak of QW enrichment. The capacitance of the electrolyte-semiconductor contact was measured by Agilent LCR-meter, which was connected to the electrochemical cell of ECV Pro through a specially designed relay module. Using numerical simulation of the electronic characteristics of nanoheterostructures by self-consistent solution of Schrodinger and Poisson equations we determined electrostatic potential profiles for band edges, band offsets, quantum-confinement levels, and concentration profiles of charge carriers for the samples under investigation. The impact of delta-layer position on the confined energy levels and carrier concentration in the QW was experimentally and theoretically analyzed in detail. We determined the optimal distance between the QW and delta layer, which provides the most efficient process of supply of charge carriers to the QW. The conducted work is directed at improvement of SHF devices, allowing one to increase the gain coefficient and transconductance of transistors.

Emission processes of the interaction between the quantum well and donor deltalayer in heterostructures for pHEMTs