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How stellar mass assembles within galaxies is still an open question. Wepresent measurements of the stellar mass distribution on kpc-scale for$\sim5500$ galaxies with stellar masses above$\log(M_{\ast}/M_{\odot})\geqslant9.8$ up to the redshift $2.0$. We createstellar mass maps from Hubble Space Telescope observations by means of thepixel-by-pixel SED fitting method. These maps are used to derive radiiencompassing $20\%$, $50\%$, and $80\%$ ($r_{20}$, $r_{50}$ and $r_{80}$) ofthe total stellar mass from the best-fit S\'ersic models. The reliability andlimitations of the structural parameter measurements are checked extensivelyusing a large sample ($\sim3000$) of simulated galaxies. The size-massrelations and redshift evolution of $r_{20}$, $r_{50}$ and $r_{80}$ areexplored for star-forming and quiescent galaxies. At fixed mass, thestar-forming galaxies do not show significant changes in their $r_{20}$,$r_{50}$ and $r_{80}$ sizes, indicating self-similar growth. Only above thepivot stellar mass of $\log(M_{\ast}/M_{\odot})\simeq10.5$, $r_{80}$ evolves as$r_{80}\propto(1+z)^{-0.85\pm0.20}$, indicating that mass builds up in theoutskirts of these systems (inside-out growth). The S\'ersic values alsoincrease for the massive star-forming galaxies towards late cosmic time.Massive quiescent galaxies show stronger size evolution at all radii, inparticular the $r_{20}$ sizes. For these massive galaxies, S\'ersic valuesremain almost constant since at least $z\sim1.3$, indicating that the strongsize evolution is related to the changes in the outer parts of these galaxies.We make all the structural parameters publicly available.

Galaxy Sizes Since $z=2$ from the Perspective of Stellar Mass Distribution within Galaxies