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We present a theoretical framework for the dynamic calibration of the highereigenmode parameters (stiffness and optical lever responsivity) of acantilever. The method is based on the tip-surface force reconstructiontechnique and does not require any prior knowledge of the eigenmode shape orthe particular form of the tip-surface interaction. The calibration methodproposed requires a single-point force measurement using a multimodal drive andits accuracy is independent of the unknown physical amplitude of a highereigenmode.

Dynamic Calibration of Higher Eigenmode Parameters of a Cantilever in Atomic Force Microscopy Using Tip-Surface Interactions