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Baha'a A.M. Al-Hilli, Nabeel M.Merza Al-Mustansiriyah Univ., College of Education, Phys. Dept., Abstract: In this work, we investigate and revealed a (NO2) gas sensing properties of Ferric oxide (Fe2O3) thin films prepared using magnetron DCsputtering technique, using different thicknesses concurring various deposition times. Each film tested with different sample temperature (200, 250 and 300) C in order to enhance gas sensitivity. The results reveal that the sensitivity increase as the film thickness decrease (lower grain size) the film gas sensitivity increases, and the gas sensitivity increase also with increasing the operating temperature.

Utilization and Measurements of Ferric Oxide thin films as a Nitride Dioxide gas sensor