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We report fabrication of low loss single mode waveguides on lithium niobateon insulator (LNOI) cladded by a layer of SiO2. Our technique, termedphotolithography assisted chemo-mechanical etching (PLACE), relies onpatterning of a chromium film into the mask shape by femtosecond lasermicromachining and subsequent chemo-mechanical etching of the lithium niobatethin film. The high-index-contrast single mode waveguide is measured to have apropagation loss of 0.13 dB/cm. Furthermore, waveguide tapers are fabricatedfor boosting the coupling efficiency.

High-index-contrast single-mode optical waveguides fabricated on lithium niobate by photolithography assisted chemo-mechanical etching (PLACE)