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ii ACKNOWLEDGMENT  iv OUTLINE  vi CHAPTER 1: INTRODUCTION  1 1.1 POWER REQUIREMENTS AND SPACE ENVIRONMENT CONDITIONS  1 1.2 ACOUSTIC WAVE DEVICES  2 1.3 PIEZOLECTRIC MATERIALS FOR SAW DEVICES  10 1.2.1 Bulk and film piezoelectric materials  10 1.2.2 PZT Film as a piezoelectric film for SAW devices  12 1.4 CONCLUSION  14 CHAPTER 2: SENSOR FABRICATION  16 2.

Micro-saw devices based on randomly-oriented PZT films: Design, fabrication and characterization