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In this study, the onset amplitude of the initial capillary surface wave for ultrasonic atomization of fluids has been implemented. The design and characterization of 485 kHz microfabricated silicon-based ultrasonic nozzles are presented for the concept of economic energy development. Each nozzle is composed of a silicon resonator and a piezoelectric drive section consisting of three Fourier horns. The required minimum energy to atomize liquid droplets is verified by COMSOL Multiphysics simulation software to clarify experimental data. The simulation study reports a minimum vibrational amplitude (onset) of 0.365 μm at the device bottom under the designated frequency of 485 kHz. The experimental study agrees well with the suggested frequency and the amplitude concerning the corresponding surface vibrational velocity in simulation. While operating, the deionized water was initially atomized into microdroplets at the given electrode voltage of 5.96 V. Microdroplets are steadily and continuously formed after the liquid feeding rate is optimized. This newly designed ultrasonic atomizer facilitates the development of capillary surface wave resonance at a designated frequency. A required vibrational amplitude and finite electric driving voltage promote not only the modern development in the green energy industry, but also the exploration of noninvasive, microencapsulated drug delivery and local spray needs.

Numerical Analysis of Ultrasonic Nebulizer for Onset Amplitude of Vibration with Atomization Experimental Results