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High specific surface area ( SSA  BET : 141.6 m 2 /g) SnO 2  nanoparticles doped with 0.2–3 wt% Ru were successfully produced in a single step by flame spray pyrolysis (FSP). The phase and crystallite size were analyzed by XRD. The specific surface area ( SSA  BET ) of the nanoparticles was measured by nitrogen adsorption (BET analysis). As the Ru concentration increased, the  SSA  BET  was found to linearly decrease, while the average BET-equivalent particle diameter ( d  BET ) increased. FSP yielded small Ru particles attached to the surface of the supporting SnO 2  nanoparticles, indicating a high  SSA  BET . The morphology and accurate size of the primary particles were further investigated by TEM. The crystallite sizes of the spherical, hexagonal, and rectangular SnO 2  particles were in the range of 3–10 nm. SnO 2  nanorods were found to range from 3–5 nm in width and 5–20 nm in length. Sensing films were prepared by the spin coating technique. The gas sensing of H 2  (500–10,000 ppm) was studied at the operating temperatures ranging from 200–350 °C in presence of dry air. After the sensing tests, the morphology and the cross-section of sensing film were analyzed by SEM and EDS analyses. The 0.2%Ru-dispersed on SnO 2  sensing film showed the highest sensitivity and a very fast response time (6 s) compared to a pure SnO 2  sensing film, with a highest H 2  concentration of 1 vol% at 350 °C and a low H 2  detection limit of 500 ppm at 200 °C.

H2 Sensing Response of Flame-spray-made Ru/SnO2 Thick Films Fabricated from Spin-Coated Nanoparticles