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The influence of damping on the dynamical behavior of the electrostaticparallel-plate and torsional actuators with the van der Waals (vdW) or Casimir force(torque) is presented. The values of the pull-in parameters and the number of theequilibrium points do not change whether there is damping or not. The ability ofequilibrium points is varied with the appearance of damping. One equilibrium point is anunstable saddle with a different damping coefficient, the other equilibrium point is astable node when the damping coefficient is greater than some critical value, andotherwise it is a stable focus. Then there are two heteroclinic orbits passing from theunstable saddle point to the stable node or focus.

Influence of Damping on the Dynamical Behavior of the Electrostatic Parallel-plate and Torsional Actuators with Intermolecular Forces